Assignee
HIROSHIRO KOUKICHI
JP·4 granted patents·22 citations·filing 2009–2011
Top patents by PatentIndex Score
4 records- 0185US8701308B2Fluid heater, manufacturing method thereof, substrate processing apparatus including fluid heater, and substrate processing methodHIROSHIRO KOUKICHI·Filed 2009·Granted Apr 22, 2014·14 cites·18 claims
- 0283US8468943B2Imprint method, computer storage medium and imprint apparatusHIROSHIRO KOUKICHI·Filed 2010·Granted Jun 25, 2013·6 cites·14 claims
- 0371US8303724B2Substrate processing method and non-transitory storage medium for carrying out such methodHIROSHIRO KOUKICHI·Filed 2011·Granted Nov 6, 2012·2 cites·10 claims
- 0441US8522712B2Template treatment method, program, computer storage medium, template treatment apparatus and imprint systemHIROSHIRO KOUKICHI·Filed 2010·Granted Sep 3, 2013·0 cites·6 claims
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