Assignee
HITACHI HIGH-TECNOLOGIES CORP
JP·2 granted patents·1 pending application·6 citations·filing 2009–2014
Top patents by PatentIndex Score
3 records- 0180US7973922B2Optical inspection method and optical inspection apparatusHITACHI HIGH TECNOLOGIES CORP·Filed 2009·Granted Jul 5, 2011·6 cites·4 claims
- 0251US8611640B2Inspection apparatus and inspection methodHITACHI HIGH TECNOLOGIES CORP·Filed 2012·Granted Dec 17, 2013·0 cites·6 claims
- 0343US2016379797A1Charged Particle Beam ApparatusHITACHI HIGH-TECNOLOGIES CORP·Filed 2014·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →