Assignee
HITACHI SCIENCE SYSTEMS LTD
JP·16 granted patents·109 citations·filing 2002–2006
Top patents by PatentIndex Score
16 records- 0190US7511271B2Scanning electron microscopeHITACHI SCIENCE SYSTEMS LTD·Filed 2005·Granted Mar 31, 2009·12 cites·16 claims
- 0287US7009178B2Scanning electron microscopeHITACHI SCIENCE SYSTEMS LTD·Filed 2005·Granted Mar 7, 2006·8 cites·3 claims
- 0381US6897445B2Scanning electron microscopeHITACHI SCIENCE SYSTEMS LTD·Filed 2003·Granted May 24, 2005·13 cites·7 claims
- 0479US7053371B2Scanning electron microscope with measurement functionHITACHI SCIENCE SYSTEMS LTD·Filed 2004·Granted May 30, 2006·13 cites·5 claims
- 0578US6949752B2Electron beam apparatus and high-voltage discharge prevention methodHITACHI SCIENCE SYSTEMS LTD·Filed 2002·Granted Sep 27, 2005·12 cites·14 claims
- 0674US6992286B2Material characterization systemHITACHI SCIENCE SYSTEMS LTD·Filed 2004·Granted Jan 31, 2006·11 cites·13 claims
- 0768US7217925B2Scanning electron microscopeHITACHI SCIENCE SYSTEMS LTD·Filed 2005·Granted May 15, 2007·1 cites·7 claims
- 0866US7274017B2Electron beam apparatus and high-voltage discharge prevention methodHITACHI SCIENCE SYSTEMS LTD·Filed 2005·Granted Sep 25, 2007·1 cites·7 claims
- 0965US7154089B2Scanning electron microscopeHITACHI SCIENCE SYSTEMS LTD·Filed 2004·Granted Dec 26, 2006·6 cites·7 claims
- 1063US6920703B2Microstructure drying treatment method and its apparatus and its high pressure vesselHITACHI SCIENCE SYSTEMS LTD·Filed 2004·Granted Jul 26, 2005·15 cites·19 claims
- 1162US7081625B2Charged particle beam apparatusHITACHI SCIENCE SYSTEMS LTD·Filed 2003·Granted Jul 25, 2006·5 cites·6 claims
- 1259US7163379B2Gradient liquid feed pump system, and liquid chromatographHITACHI SCIENCE SYSTEMS LTD·Filed 2003·Granted Jan 16, 2007·3 cites·7 claims
- 1358US6972405B2Nanoscale standard sample and its manufacturing methodHITACHI SCIENCE SYSTEMS LTD·Filed 2003·Granted Dec 6, 2005·3 cites·11 claims
- 1457US7033089B2Method of developing a resist film and a resist development processorHITACHI SCIENCE SYSTEMS LTD·Filed 2003·Granted Apr 25, 2006·6 cites·4 claims
- 1553US7041977B2Electron microscopeHITACHI SCIENCE SYSTEMS LTD·Filed 2005·Granted May 9, 2006·0 cites·5 claims
- 1646US7179000B2Method of developing a resist film and a resist development processorHITACHI SCIENCE SYSTEMS LTD·Filed 2006·Granted Feb 20, 2007·0 cites·3 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →