Assignee
HOFMANS GERARDUS CAROLUS JOHANNUS
NL·3 granted patents·7 citations·filing 2008–2012
Top patents by PatentIndex Score
3 records- 0177US8436998B2Method of measuring focus of a lithographic projection apparatusHOFMANS GERARDUS CAROLUS JOHANNUS·Filed 2012·Granted May 7, 2013·3 cites·9 claims
- 0264US8446564B2Lithographic apparatus and device manufacturing methodHOFMANS GERARDUS CAROLUS JOHANNUS·Filed 2009·Granted May 21, 2013·2 cites·16 claims
- 0364US8289516B2Method of measuring focus of a lithographic projection apparatusHOFMANS GERARDUS CAROLUS JOHANNUS·Filed 2008·Granted Oct 16, 2012·2 cites·12 claims
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