Assignee
HOFMEISTER CHRISTOPHER
US7 patents
Top patents by PatentIndex Score
US8602706B2Dec 10, 2013
Substrate processing apparatus
HOFMEISTER CHRISTOPHER25 citations92
US8562271B2Oct 22, 2013
Compact substrate transport system
HOFMEISTER CHRISTOPHER24 citations92
US8272825B2Sep 25, 2012
Load lock fast pump vent
HOFMEISTER CHRISTOPHER33 citations90
US8651789B2Feb 18, 2014
Substrate processing apparatus
HOFMEISTER CHRISTOPHER6 citations84
US8267636B2Sep 18, 2012
Substrate transport apparatus
HOFMEISTER CHRISTOPHER9 citations84
US8752449B2Jun 17, 2014
Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
HOFMEISTER CHRISTOPHER6 citations82
US8747050B2Jun 10, 2014
Substrate transport apparatus
HOFMEISTER CHRISTOPHER0 citations52