Assignee
HOHENWARTER KARL-HEINZ
AT·4 granted patents·1 pending application·21 citations·filing 2010–2012
Top patents by PatentIndex Score
5 records- 0189US8926788B2Closed chamber for wafer wet processingHOHENWARTER KARL-HEINZ·Filed 2010·Granted Jan 6, 2015·14 cites·15 claims
- 0277US8955529B2Device and method for wet treating disc-shaped articlesHOHENWARTER KARL-HEINZ·Filed 2010·Granted Feb 17, 2015·4 cites·5 claims
- 0359US9355883B2Method and apparatus for liquid treatment of wafer shaped articlesHOHENWARTER KARL-HEINZ·Filed 2011·Granted May 31, 2016·2 cites·17 claims
- 0457US9316443B2Method and apparatus for liquid treatment of wafer shaped articlesHOHENWARTER KARL-HEINZ·Filed 2012·Granted Apr 19, 2016·1 cites·13 claims
- 0537US2014053982A1Method and apparatus for processing wafer-shaped articlesHOHENWARTER KARL-HEINZ·Filed 2012·Application pending·0 cites
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