Assignee
HOLLAND JOHN PATRICK
US4 patents
Top patents by PatentIndex Score
US8900402B2Dec 2, 2014
Semiconductor processing system having multiple decoupled plasma sources
HOLLAND JOHN PATRICK38 citations93
US9177756B2Nov 3, 2015
E-beam enhanced decoupled source for semiconductor processing
HOLLAND JOHN PATRICK23 citations92
US9111728B2Aug 18, 2015
E-beam enhanced decoupled source for semiconductor processing
HOLLAND JOHN PATRICK8 citations83
US8900403B2Dec 2, 2014
Semiconductor processing system having multiple decoupled plasma sources
HOLLAND JOHN PATRICK7 citations83