Assignee
HOSOYA MORIO
JP4 patents
Top patents by PatentIndex Score
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Reflective mask blank and method of manufacturing a reflective mask
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Reflective mask blank, method of manufacturing a reflective mask blank and method of manufacturing a reflective mask
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US8389184B2Mar 5, 2013
Reflective mask blank and method of manufacturing a reflective mask
HOSOYA MORIO0 citations50
US8081384B2Dec 20, 2011
Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask
HOSOYA MORIO0 citations39