Assignee
HSU DUAN-FU STEPHEN
US·6 granted patents·47 citations·filing 2007–2013
Top patents by PatentIndex Score
6 records- 0191US8111921B2Method and apparatus for performing model-based OPC for pattern decomposed featuresHSU DUAN-FU STEPHEN·Filed 2007·Granted Feb 7, 2012·19 cites·16 claims
- 0289US8391605B2Method and apparatus for performing model-based OPC for pattern decomposed featuresHSU DUAN-FU STEPHEN·Filed 2012·Granted Mar 5, 2013·9 cites·22 claims
- 0384US8644589B2Method and apparatus for performing model-based OPC for pattern decomposed featuresHSU DUAN-FU STEPHEN·Filed 2013·Granted Feb 4, 2014·8 cites·12 claims
- 0482US8182969B2Lithographic processing method, and device manufactured therebyHSU DUAN-FU STEPHEN·Filed 2009·Granted May 22, 2012·6 cites·8 claims
- 0580US8486589B2Lithographic processing method, and device manufactured therebyHSU DUAN-FU STEPHEN·Filed 2012·Granted Jul 16, 2013·3 cites·14 claims
- 0679US8632930B2Method and apparatus for performing dark field double dipole lithography (DDL)HSU DUAN-FU STEPHEN·Filed 2011·Granted Jan 21, 2014·2 cites·14 claims
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