Assignee
HUANG CHUNG-HO
US·3 granted patents·1 pending application·6 citations·filing 2008–2010
Top patents by PatentIndex Score
4 records- 0176US8906163B2Methods and apparatus for integrating and controlling a plasma processing systemHUANG CHUNG-HO·Filed 2010·Granted Dec 9, 2014·3 cites·20 claims
- 0261US8295963B2Methods for performing data management for a recipe-and-component control moduleHUANG CHUNG-HO·Filed 2010·Granted Oct 23, 2012·1 cites·17 claims
- 0356US8983631B2Arrangement for identifying uncontrolled events at the process module level and methods thereofHUANG CHUNG HO·Filed 2009·Granted Mar 17, 2015·2 cites·20 claims
- 0445US2009089024A1Methods and arrangement for creating models for fine-tuning recipesHUANG CHUNG-HO·Filed 2008·Application pending·0 cites
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