Assignee
HUANG WU-SONG
US·8 granted patents·1 pending application·20 citations·filing 2008–2012
Top patents by PatentIndex Score
9 records- 0189US8546062B2Self-forming top anti-reflective coating compositions and, photoresist mixtures and method of imaging using sameHUANG WU-SONG·Filed 2011·Granted Oct 1, 2013·7 cites·16 claims
- 0280US8097401B2Self-forming top anti-reflective coating compositions and, photoresist mixtures and method of imaging using sameHUANG WU-SONG·Filed 2009·Granted Jan 17, 2012·4 cites·14 claims
- 0379US8182978B2Developable bottom antireflective coating compositions especially suitable for ion implant applicationsHUANG WU-SONG·Filed 2009·Granted May 22, 2012·4 cites·21 claims
- 0475US8772376B2Near-infrared absorbing film compositionsHUANG WU-SONG·Filed 2009·Granted Jul 8, 2014·3 cites·13 claims
- 0570US8158014B2Multi-exposure lithography employing differentially sensitive photoresist layersHUANG WU-SONG·Filed 2008·Granted Apr 17, 2012·2 cites·17 claims
- 0656US8546069B2Method for enhancing lithographic imaging of isolated and semi-isolated featuresHUANG WU-SONG·Filed 2009·Granted Oct 1, 2013·0 cites·15 claims
- 0755US8557501B2Developable bottom antireflective coating compositions especially suitable for ion implant applicationsHUANG WU-SONG·Filed 2012·Granted Oct 15, 2013·0 cites·16 claims
- 0852US2012156450A1Multi-exposure lithography employing differentially sensitive photoresist layersHUANG WU-SONG·Filed 2012·Application pending·0 cites
- 0939US8394573B2Photoresist compositions and methods for shrinking a photoresist critical dimensionHUANG WU-SONG·Filed 2010·Granted Mar 12, 2013·0 cites·16 claims
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