Assignee

HUH SONG WHE

KR·2 granted patents·6 citations·filing 2012–2016

Technology mixB05D2 C23C2 H01J2 H01L2 H10P2

Top patents by PatentIndex Score

2 records

0179US9960073B2Substrate processing apparatus and substrate processing methodHUH SONG WHE·Filed 2016·Granted May 1, 2018·4 cites·16 claims
0265US9387510B2Substrate processing apparatus and substrate processing methodHUH SONG WHE·Filed 2012·Granted Jul 12, 2016·2 cites·14 claims

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