Assignee
HWANG CHIH-HONG
TW·4 granted patents·0 citations·filing 2011–2012
Top patents by PatentIndex Score
4 records- 0149US9070534B2Ion beam dimension control for ion implantation process and apparatus, and advanced process controlHWANG CHIH-HONG·Filed 2012·Granted Jun 30, 2015·0 cites·19 claims
- 0247US8766207B2Beam monitoring device, method, and systemHWANG CHIH-HONG·Filed 2011·Granted Jul 1, 2014·0 cites·20 claims
- 0347US8664622B2System and method of ion beam source for semiconductor ion implantationHWANG CHIH-HONG·Filed 2012·Granted Mar 4, 2014·0 cites·20 claims
- 0443US8922122B2Ion implantation with charge and direction controlHWANG CHIH-HONG·Filed 2011·Granted Dec 30, 2014·0 cites·19 claims
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