Assignee
HWANG YOUNG JOO
KR·1 granted patent·1 pending application·51 citations·filing 2007–2008
Top patents by PatentIndex Score
2 records- 0190US8845810B2Substrate damage prevention system and methodHWANG YOUNG JOO·Filed 2007·Granted Sep 30, 2014·51 cites·16 claims
- 0242US2009263230A1Cluster apparatus for processing substrate and method for processing substrate using cluster apparatusHWANG YOUNG JOO·Filed 2008·Application pending·0 cites
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