Assignee
HYAKUTAKE HIRONOBU
JP·3 granted patents·6 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0176US9027573B2Substrate processing apparatus for maintaining a more uniform temperature during substrate processingHYAKUTAKE HIRONOBU·Filed 2011·Granted May 12, 2015·5 cites·12 claims
- 0253US8685169B2Substrate processing apparatus, substrate processing method and storage mediumHYAKUTAKE HIRONOBU·Filed 2010·Granted Apr 1, 2014·1 cites·13 claims
- 0342US8882961B2Substrate treatment apparatusHYAKUTAKE HIRONOBU·Filed 2009·Granted Nov 11, 2014·0 cites·10 claims
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