Assignee
IAS INC
JP7 patents
Top patents by PatentIndex Score
US10151727B2Dec 11, 2018
Automatic localized substrate analysis device and analysis method
IAS INC6 citations69
US11569081B2Jan 31, 2023
Method for analyzing metal fine particles, and inductively coupled plasma mass spectrometry method
IAS INC2 citations68
US10024801B2Jul 17, 2018
Analysis system for online-transferred analysis sample
IAS INC2 citations66
US10688485B2Jun 23, 2020
Substrate analysis nozzle and method for analyzing substrate
IAS INC1 citations61
US12354862B2Jul 8, 2025
Method for analyzing metal microparticles, and inductively coupled plasma mass spectrometry method
IAS INC0 citations58
US11422071B2Aug 23, 2022
Substrate analysis method and substrate analyzer
IAS INC0 citations50
US9741627B2Aug 22, 2017
Substrate etching apparatus and substrate analysis method
IAS INC0 citations45