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IKEHASHI TAMIO
JP9 patents
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MEMS element
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MEMS device having a movable structure
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Electrostatic actuator apparatus
IKEHASHI TAMIO8 citations84
US8138655B2Mar 20, 2012
Electrostatic actuator with electrodes having varying distances at different portions
IKEHASHI TAMIO11 citations84
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MEMS device
IKEHASHI TAMIO6 citations73
US8604725B2Dec 10, 2013
Semiconductor device and drive method of electrostatic actuator
IKEHASHI TAMIO3 citations63
US8461743B2Jun 11, 2013
Electrostatic actuator apparatus and method of driving the same
IKEHASHI TAMIO2 citations63
US8274324B2Sep 25, 2012
Electrostatic actuator apparatus
IKEHASHI TAMIO3 citations63
US8169770B2May 1, 2012
Semiconductor integrated circuit including circuit for driving electrostatic actuator, micro-electro-mechanical systems, and driving method of electrostatic actuator
IKEHASHI TAMIO3 citations63