Assignee
IKEHATA YOSHITERU
JP·2 granted patents·7 citations·filing 2007–2007
Top patents by PatentIndex Score
2 records- 0166US8388298B2Apparatus for automatically correcting a positional deviation of a loadIKEHATA YOSHITERU·Filed 2007·Granted Mar 5, 2013·4 cites·15 claims
- 0266US8118530B2Substrate storage facility and substrate processing facility, and method for operating substrate storageIKEHATA YOSHITERU·Filed 2007·Granted Feb 21, 2012·3 cites·8 claims
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