Assignee

IMHOF JOSEPH MICHAEL

US·1 granted patent·0 citations·filing 2011–2011

Technology mixB29C1 B82B1 B82Y1 G03F1 G03G1

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0135US8935981B2High contrast alignment marks through multiple stage imprintingIMHOF JOSEPH MICHAEL·Filed 2011·Granted Jan 20, 2015·0 cites·15 claims

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