Assignee
IMM INST FUR MIKROTECHNIK GMBH
DE·3 granted patents·99 citations·filing 1993–1994
Top patents by PatentIndex Score
3 records- 0189US5465611ASensor head for use in atomic force microscopy and method for its productionIMM INST FUR MIKROTECHNIK GMBH·Filed 1994·Granted Nov 14, 1995·83 cites·20 claims
- 0245US5376506AMethod to produce nonlinear optical microcomponentsIMM INST FUR MIKROTECHNIK GMBH·Filed 1993·Granted Dec 27, 1994·15 cites·16 claims
- 0326US5376507AMethod to produce nonlinear optical microcomponentsIMM INST FUR MIKROTECHNIK GMBH·Filed 1993·Granted Dec 27, 1994·1 cites·14 claims
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