Assignee
IMS IONEN MIKROFAB SYST
AT·24 granted patents·1 pending application·437 citations·filing 1986–2004
Top patents by PatentIndex Score
25 records- 0193US6858118B2Apparatus for enhancing the lifetime of stencil masksIMS IONEN MIKROFAB SYST·Filed 2003·Granted Feb 22, 2005·52 cites·12 claims
- 0283US6136160AProcess for producing a carbon film on a substrateIMS IONEN MIKROFAB SYST·Filed 1999·Granted Oct 24, 2000·72 cites·14 claims
- 0380US4894549AApparatus for demagnification or full-size ion projection lithographyIMS IONEN MIKROFAB SYST·Filed 1988·Granted Jan 16, 1990·25 cites·18 claims
- 0478US4780382AProcess for making a transmission maskIMS IONEN MIKROFAB SYST·Filed 1986·Granted Oct 25, 1988·28 cites·11 claims
- 0576US6909103B2Ion irradiation of a target at very high and very low kinetic ion energiesIMS IONEN MIKROFAB SYST·Filed 2004·Granted Jun 21, 2005·12 cites·11 claims
- 0675US6472673B1Lithographic method for producing an exposure pattern on a substrateIMS IONEN MIKROFAB SYST·Filed 1999·Granted Oct 29, 2002·32 cites·13 claims
- 0770US4859857AIon-projection apparatus and method of operating sameIMS IONEN MIKROFAB SYST·Filed 1987·Granted Aug 22, 1989·16 cites·23 claims
- 0869US5350924AIon-optical imaging systemIMS IONEN MIKROFAB SYST·Filed 1992·Granted Sep 27, 1994·21 cites·12 claims
- 0969US4823011AIon-projection lithographic apparatus with means for aligning the mask image with the substrateIMS IONEN MIKROFAB SYST·Filed 1987·Granted Apr 18, 1989·16 cites·19 claims
- 1064US6661015B2Pattern lock systemIMS IONEN MIKROFAB SYST·Filed 2001·Granted Dec 9, 2003·6 cites·11 claims
- 1164US5672449ASilicon membrane and method of making sameIMS IONEN MIKROFAB SYST·Filed 1995·Granted Sep 30, 1997·19 cites·21 claims
- 1263US6326632B1Particle-optical imaging system for lithography purposesIMS IONEN MIKROFAB SYST·Filed 1999·Granted Dec 4, 2001·23 cites·7 claims
- 1360US6194730B1Electrostatic lensIMS IONEN MIKROFAB SYST·Filed 1998·Granted Feb 27, 2001·14 cites·10 claims
- 1459US5876880AProcess for producing a structured maskIMS IONEN MIKROFAB SYST·Filed 1995·Granted Mar 2, 1999·19 cites·29 claims
- 1556US4835392AIon-projection apparatusIMS IONEN MIKROFAB SYST·Filed 1987·Granted May 30, 1989·9 cites·14 claims
- 1654US5317161AIon sourceIMS IONEN MIKROFAB SYST·Filed 1992·Granted May 31, 1994·13 cites·16 claims
- 1753US5436460AIon-optical imaging systemIMS IONEN MIKROFAB SYST·Filed 1993·Granted Jul 25, 1995·11 cites·10 claims
- 1852US4924104AIon beam apparatus and method of modifying substrateIMS IONEN MIKROFAB SYST·Filed 1988·Granted May 8, 1990·10 cites·11 claims
- 1952US4775797AMethod of stabilizing a maskIMS IONEN MIKROFAB SYST·Filed 1986·Granted Oct 4, 1988·10 cites·14 claims
- 2050US5874739AArrangement for shadow-casting lithographyIMS IONEN MIKROFAB SYST·Filed 1997·Granted Feb 23, 1999·9 cites·12 claims
- 2141US5693950AProjection system for charged particlesIMS IONEN MIKROFAB SYST·Filed 1995·Granted Dec 2, 1997·5 cites·12 claims
- 2238US6156217AMethod for the purpose of producing a stencil maskIMS IONEN MIKROFAB SYST·Filed 1997·Granted Dec 5, 2000·6 cites·8 claims
- 2335US6296700B1Method of producing a structured layerIMS IONEN MIKROFAB SYST·Filed 1999·Granted Oct 2, 2001·6 cites·5 claims
- 2434US4891547AParticle or radiation beam mask and process for making sameIMS IONEN MIKROFAB SYST·Filed 1988·Granted Jan 2, 1990·3 cites·7 claims
- 2534US2001036588A1Lithographic imaging of a structure pattern onto one or more fields on a substrateIMS IONEN MIKROFAB SYST·Filed 2001·Application pending·0 cites
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