Assignee
IMT CO LTD
KR·4 granted patents·7 pending applications·31 citations·filing 2002–2024
Top patents by PatentIndex Score
11 records- 0172US6635845B2Dry surface cleaning apparatus using a laserIMT CO LTD·Filed 2002·Granted Oct 21, 2003·19 cites·17 claims
- 0270US10274519B2Wafer inspection equipment having laser cleaning functionIMT CO LTD·Filed 2015·Granted Apr 30, 2019·2 cites·18 claims
- 0366US10512949B2Micro dry ice snow spray type cleaning deviceIMT CO LTD·Filed 2015·Granted Dec 24, 2019·1 cites·5 claims
- 0461US6734388B2Dry surface cleaning apparatusIMT CO LTD·Filed 2002·Granted May 11, 2004·9 cites·10 claims
- 0561US2025342111A1Smartphone inspection deviceIMT CO LTD·Filed 2024·Application pending·0 cites
- 0654US2023001460A1Manual laser cleaning deviceIMT CO LTD·Filed 2020·Application pending·0 cites
- 0746US2023009781A1Semiconductor mold laser cleaning deviceIMT CO LTD·Filed 2020·Application pending·0 cites
- 0843US2017140951A1Three-dimensional wafer surface washing method and deviceIMT CO LTD·Filed 2014·Application pending·0 cites
- 0943US2016372317A1Device and method for cleaning backside or edge of waferIMT CO LTD·Filed 2014·Application pending·0 cites
- 1042US2013126490A1Large-area mask cleaning apparatus using laser and large-area mask cleaning system including the sameIMT CO LTD·Filed 2012·Application pending·0 cites
- 1140US2006108330A1Apparatus for dry-surface cleaning using a laserIMT CO LTD·Filed 2005·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →