Assignee
INABA SHOGO
JP8 patents
Top patents by PatentIndex Score
US8525277B2Sep 3, 2013
MEMS device
INABA SHOGO3 citations62
US8198957B2Jun 12, 2012
Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
INABA SHOGO1 citations62
US8129804B2Mar 6, 2012
Electronic device, resonator, oscillator and method for manufacturing electronic device
INABA SHOGO3 citations62
US8063721B2Nov 22, 2011
Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
INABA SHOGO1 citations62
US8760234B2Jun 24, 2014
MEMS vibrator and oscillator
INABA SHOGO0 citations51
US8592925B2Nov 26, 2013
Functional device with functional structure of a microelectromechanical system disposed in a cavity of a substrate, and manufacturing method thereof
INABA SHOGO0 citations51
US8552512B2Oct 8, 2013
MEMS device and fabrication method thereof
INABA SHOGO1 citations51
US8432232B2Apr 30, 2013
MEMS device and oscillator
INABA SHOGO1 citations51