Assignee
INABE HARUKI
JP·2 granted patents·0 citations·filing 2010–2010
Top patents by PatentIndex Score
2 records- 0140US9023576B2Positive resist composition for immersion exposure and pattern-forming method using the sameINABE HARUKI·Filed 2010·Granted May 5, 2015·0 cites·24 claims
- 0233US8808975B2Positive resist composition for immersion exposure and pattern-forming method using the sameINABE HARUKI·Filed 2010·Granted Aug 19, 2014·0 cites·7 claims
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