Assignee
INASAKI TAKESHI
JP·3 granted patents·1 pending application·7 citations·filing 2011–2012
Top patents by PatentIndex Score
4 records- 0180US8735048B2Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the composition and pattern forming methodINASAKI TAKESHI·Filed 2011·Granted May 27, 2014·4 cites·15 claims
- 0278US8673538B2Actinic ray-sensitive or radiation-sensitive resin composition, and actinic ray-sensitive or radiation-sensitive film and pattern forming method using the compositionINASAKI TAKESHI·Filed 2012·Granted Mar 18, 2014·3 cites·18 claims
- 0341US8574814B2Actinic ray-sensitive or radiation-sensitive resin composition, and actinic ray-sensitive or radiation-sensitive film and pattern forming method using the compositionINASAKI TAKESHI·Filed 2012·Granted Nov 5, 2013·0 cites·17 claims
- 0439US2012202141A1Chemical amplification type positive resist composition, and resist film, resist coated mask blanks and resist pattern forming method using the compositionINASAKI TAKESHI·Filed 2012·Application pending·0 cites
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