Assignee
INATOMI YUICHIRO
JP·8 granted patents·1 pending application·28 citations·filing 2008–2012
Top patents by PatentIndex Score
9 records- 0194US8420304B2Resist coating and developing apparatus, resist coating and developing method, resist-film processing apparatus, and resist-film processing methodINATOMI YUICHIRO·Filed 2010·Granted Apr 16, 2013·19 cites·3 claims
- 0285US9505019B2Plating apparatus, plating method and storage mediumINATOMI YUICHIRO·Filed 2012·Granted Nov 29, 2016·3 cites·8 claims
- 0374US8691497B2Developing treatment methodINATOMI YUICHIRO·Filed 2010·Granted Apr 8, 2014·3 cites·12 claims
- 0467US8411246B2Resist coating and developing apparatus and methodINATOMI YUICHIRO·Filed 2010·Granted Apr 2, 2013·2 cites·8 claims
- 0562US8563230B2Substrate processing method and substrate processing systemINATOMI YUICHIRO·Filed 2008·Granted Oct 22, 2013·1 cites·6 claims
- 0655US8646403B2Method for improving surface roughness of processed film of substrate and apparatus for processing substrateINATOMI YUICHIRO·Filed 2009·Granted Feb 11, 2014·0 cites·6 claims
- 0752US9777379B2Plating apparatus, plating method and storage mediumINATOMI YUICHIRO·Filed 2012·Granted Oct 3, 2017·0 cites·4 claims
- 0852US2014120264A1Plating apparatus, plating method and storage mediumINATOMI YUICHIRO·Filed 2012·Application pending·0 cites
- 0948US8728247B2Substrate processing method, storage medium storing program for executing substrate processing method and substrate processing apparatusINATOMI YUICHIRO·Filed 2010·Granted May 20, 2014·0 cites·6 claims
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