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INFICON INC
US38 patents
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US7041984B2May 9, 2006
Replaceable anode liner for ion source
INFICON INC11 citations82
USD978662SFeb 21, 2023
Sensor package
INFICON INC13 citations73
US10175198B2Jan 8, 2019
System and method for optimal chemical analysis
INFICON INC9 citations69
US10502651B2Dec 10, 2019
Creating a mini environment for gas analysis
INFICON INC3 citations68
US9645125B2May 9, 2017
Vacuum chamber measurement using residual gas analyzer
INFICON INC3 citations68
US9182378B2Nov 10, 2015
High capacity monitor crystal exchanger utilizing an organized 3-D storage structure
INFICON INC5 citations68
US11929270B2Mar 12, 2024
Unconsumed precursor monitoring
INFICON INC2 citations66
US11335575B2May 17, 2022
Unconsumed precursor monitoring
INFICON INC4 citations66
US7257494B2Aug 14, 2007
Inter-process sensing of wafer outcome
INFICON INC7 citations65
US6991110B2Jan 31, 2006
Package for storing sensor crystals and related method of use
INFICON INC7 citations63
US11569079B2Jan 31, 2023
Gas analyzer and membranes therefor
INFICON INC0 citations61
US7821250B2Oct 26, 2010
RF sensor clamp assembly
INFICON INC4 citations60
US7728250B2Jun 1, 2010
RF sensor clamp assembly
INFICON INC2 citations60
US6642641B2Nov 4, 2003
Apparatus for measuring total pressure and partial pressure with common electron beam
INFICON INC4 citations60
US6476612B1Nov 5, 2002
Louvered beam stop for lowering x-ray limit of a total pressure gauge
INFICON INC3 citations60
US12227846B2Feb 18, 2025
Monitoring thin film deposition
INFICON INC0 citations57
US11175323B2Nov 16, 2021
Process monitoring using crystal with reactance sensor
INFICON INC0 citations57
US10704150B2Jul 7, 2020
Monitoring thin film deposition
INFICON INC1 citations57
US12106953B2Oct 1, 2024
Wide range electron impact ion source for a mass spectrometer
INFICON INC0 citations56
US6906799B2Jun 14, 2005
Signal processing method for in-situ, scanned-beam particle monitoring
INFICON INC6 citations54
US11282687B2Mar 22, 2022
Chemical analysis device and method
INFICON INC0 citations53
US10755909B2Aug 25, 2020
Chemical analysis device and method
INFICON INC1 citations53
US7538562B2May 26, 2009
High performance miniature RF sensor for use in microelectronics plasma processing tools
INFICON INC6 citations53
US12276649B2Apr 15, 2025
Method for displaying concentration data of a substance and an associated apparatus
INFICON INC0 citations52
US12266552B2Apr 1, 2025
System and method for monitoring semiconductor processes
INFICON INC0 citations52
US11841354B2Dec 12, 2023
Method for displaying concentration data of a substance and an associated apparatus
INFICON INC1 citations52
US11784031B2Oct 10, 2023
Method of detecting radicals using mass spectrometry
INFICON INC0 citations52
US12198897B2Jan 14, 2025
HTCC antenna for generation of microplasma
INFICON INC0 citations51
US11658020B2May 23, 2023
Ion source assembly with multiple ionization volumes for use in a mass spectrometer
INFICON INC0 citations51
US9506895B2Nov 29, 2016
Combined crystal retainer and contact system for deposition monitor sensors
INFICON INC1 citations47
US10047437B2Aug 14, 2018
Process gas management system and photoionization detector
INFICON INC1 citations45
US12494358B2Dec 9, 2025
Ion source assembly with multiple elliptical filaments
INFICON INC0 citations44
US9217663B2Dec 22, 2015
Multi-chambered acoustic sensor for determination gas composition
INFICON INC0 citations39
US12577675B2Mar 17, 2026
System and method for mass flow measurement and control of process gases in a carrier stream using one or more quartz crystal microbalance sensors
INFICON INC0 citations38
US11875984B2Jan 16, 2024
Time-of-flight mass spectrometer assembly with a secondary flange
INFICON INC0 citations37
US10985000B2Apr 20, 2021
Chemical analyzer with membrane
INFICON INC0 citations33
US8916822B2Dec 23, 2014
Dual-detection residual gas analyzer
INFICON INC0 citations33
US12347667B2Jul 1, 2025
Method of auto tuning one or more sensors
INFICON INC0 citations31