Assignee
INFICON LT INC
US·2 granted patents·1 pending application·26 citations·filing 2002–2004
Top patents by PatentIndex Score
3 records- 0169US6912435B2Methods and systems for controlling reticle-induced errorsINFICON LT INC·Filed 2002·Granted Jun 28, 2005·14 cites·40 claims
- 0268US6700950B1Methods and systems for controlling critical dimension (CD) errorINFICON LT INC·Filed 2002·Granted Mar 2, 2004·12 cites·43 claims
- 0333US2005095515A1Methods and systems for processing overlay dataINFICON LT INC·Filed 2004·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →