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INOPLA INC
US5 patents
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US7364496B2Apr 29, 2008
Polishing head for polishing semiconductor wafers
INOPLA INC11 citations78
US7374471B2May 20, 2008
Apparatus and method for polishing semiconductor wafers using one or more pivotable load-and-unload cups
INOPLA INC5 citations62
US7223153B2May 29, 2007
Apparatus and method for polishing semiconductor wafers using one or more polishing surfaces
INOPLA INC5 citations62
US7367866B2May 6, 2008
Apparatus and method for polishing semiconductor wafers using pivotable load/unload cups
INOPLA INC1 citations51
US7238614B2Jul 3, 2007
Methods for fabricating one or more metal damascene structures in a semiconductor wafer
INOPLA INC1 citations51