Assignee
INSPEX INC
US12 patents
Top patents by PatentIndex Score
US4772126ASep 20, 1988
Particle detection method and apparatus
INSPEX INC73 citations95
US5805278ASep 8, 1998
Particle detection method and apparatus
INSPEX INC84 citations94
US5659390AAug 19, 1997
Method and apparatus for detecting particles on a surface of a semiconductor wafer having repetitive patterns
INSPEX INC59 citations94
US5317380AMay 31, 1994
Particle detection method and apparatus
INSPEX INC85 citations94
US4895446AJan 23, 1990
Particle detection method and apparatus
INSPEX INC60 citations92
US6774991B1Aug 10, 2004
Method and apparatus for inspecting a patterned semiconductor wafer
INSPEX INC54 citations91
US6621570B1Sep 16, 2003
Method and apparatus for inspecting a patterned semiconductor wafer
INSPEX INC47 citations91
US6028664AFeb 22, 2000
Method and system for establishing a common reference point on a semiconductor wafer inspected by two or more scanning mechanisms
INSPEX INC46 citations87
US5742422AApr 21, 1998
Adjustable fourier mask
INSPEX INC23 citations87
US5667353ASep 16, 1997
Robot system
INSPEX INC41 citations87
US6097428AAug 1, 2000
Method and apparatus for inspecting a semiconductor wafer using a dynamic threshold
INSPEX INC28 citations82
US6643006B1Nov 4, 2003
Method and system for reviewing a semiconductor wafer using at least one defect sampling condition
INSPEX INC18 citations80