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INSYSTEMS INC
US5 patents
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US4806774AFeb 21, 1989
Inspection system for array of microcircuit dies having redundant circuit patterns
INSYSTEMS INC140 citations95
US4811409AMar 7, 1989
Method and apparatus for detecting defect information in a holographic image pattern
INSYSTEMS INC32 citations91
US5172000ADec 15, 1992
Spatial filter for optically based defect inspection system
INSYSTEMS INC43 citations89
US4659172AApr 21, 1987
Rotatable and translatable mounting mechanism for a specimen pattern in optical processing apparatus
INSYSTEMS INC17 citations72
US4712851ADec 15, 1987
Positioning alignment apparatus and method using holographic optical elements
INSYSTEMS INC18 citations71