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ION BEAM SERVICES
FR8 patents
Top patents by PatentIndex Score
US9524853B2Dec 20, 2016
Ion implantation machine presenting increased productivity
ION BEAM SERVICES2 citations59
US12266692B2Apr 1, 2025
Device for improving the mobility of carriers in a MOSFET channel on silicon carbide
ION BEAM SERVICES0 citations58
US10923325B2Feb 16, 2021
Method of controlling an implanter operating in plasma immersion
ION BEAM SERVICES0 citations50
US11053582B2Jul 6, 2021
Support including an electrostatic substrate carrier
ION BEAM SERVICES0 citations48
US9922856B2Mar 20, 2018
Electrostatic heating substrate holder which is polarised at high voltage
ION BEAM SERVICES0 citations48
US9552962B2Jan 24, 2017
Method of controlling an ion implanter in plasma immersion mode
ION BEAM SERVICES1 citations48
US9520274B2Dec 13, 2016
Ion implanter provided with a plurality of plasma source bodies
ION BEAM SERVICES1 citations48
US9035269B2May 19, 2015
Control module for an ion implanter
ION BEAM SERVICES1 citations48