Assignee
IPEC PRECISION INC
US·5 granted patents·238 citations·filing 1995–1997
Top patents by PatentIndex Score
5 records- 0187US6099056ANon-contact holder for wafer-like articlesIPEC PRECISION INC·Filed 1997·Granted Aug 8, 2000·92 cites·17 claims
- 0274US5688415ALocalized plasma assisted chemical etching through a maskIPEC PRECISION INC·Filed 1995·Granted Nov 18, 1997·41 cites·8 claims
- 0367US6105534AApparatus for plasma jet treatment of substratesIPEC PRECISION INC·Filed 1997·Granted Aug 22, 2000·31 cites·7 claims
- 0463US6040548AApparatus for generating and deflecting a plasma jetIPEC PRECISION INC·Filed 1997·Granted Mar 21, 2000·40 cites·8 claims
- 0563US5700297AApparatus for providing consistent, non-jamming registration of notched semiconductor wafersIPEC PRECISION INC·Filed 1996·Granted Dec 23, 1997·34 cites·5 claims
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