Assignee
IPS LTD
US·14 granted patents·4 pending applications·795 citations·filing 1999–2010
Top patents by PatentIndex Score
18 records- 0198US6579372B2Apparatus and method for depositing thin film on wafer using atomic layer depositionIPS LTD·Filed 2001·Granted Jun 17, 2003·210 cites·19 claims
- 0296US7410676B2Chemical vapor deposition methodIPS LTD·Filed 2005·Granted Aug 12, 2008·31 cites·3 claims
- 0394US6573184B2Apparatus and method for depositing thin film on wafer using atomic layer depositionIPS LTD·Filed 2002·Granted Jun 3, 2003·60 cites·9 claims
- 0493US6231672B1Apparatus for depositing thin films on semiconductor wafer by continuous gas injectionIPS LTD·Filed 1999·Granted May 15, 2001·157 cites·6 claims
- 0590US6183563B1Apparatus for depositing thin films on semiconductor wafersIPS LTD·Filed 1999·Granted Feb 6, 2001·246 cites·7 claims
- 0685US6852168B2Reactor for depositing thin film on waferIPS LTD·Filed 2001·Granted Feb 8, 2005·29 cites·8 claims
- 0782US6796316B2Atomic layer deposition (ALD) thin film deposition equipment having cleaning apparatus and cleaning methodIPS LTD·Filed 2001·Granted Sep 28, 2004·27 cites·14 claims
- 0871US7803656B2Method of depositing chalcogenide film for phase-change memoryIPS LTD·Filed 2007·Granted Sep 28, 2010·1 cites·6 claims
- 0970US7638437B2In-situ thin-film deposition methodIPS LTD·Filed 2005·Granted Dec 29, 2009·3 cites·9 claims
- 1070US6884297B2Thin film deposition reactorIPS LTD·Filed 2004·Granted Apr 26, 2005·19 cites·4 claims
- 1169US7253101B2Deposition method of TiN thin film having a multi-layer structureIPS LTD·Filed 2005·Granted Aug 7, 2007·3 cites·37 claims
- 1260US7785664B2Method of depositing thin filmIPS LTD·Filed 2005·Granted Aug 31, 2010·1 cites·23 claims
- 1357US2011083735A1Solar cell and method of fabricating the sameIPS LTD·Filed 2010·Application pending·0 cites
- 1456US6740166B2Thin film deposition apparatus for semiconductorIPS LTD·Filed 2000·Granted May 25, 2004·6 cites·14 claims
- 1546US2011114114A1Cleaning method of apparatus for depositing carbon containing filmIPS LTD·Filed 2008·Application pending·0 cites
- 1642US2010190341A1Apparatus, method for depositing thin film on wafer and method for gap-filling trench using the sameIPS LTD·Filed 2008·Application pending·0 cites
- 1739US7163719B2Method of depositing thin film using hafnium compoundIPS LTD·Filed 2003·Granted Jan 16, 2007·2 cites·17 claims
- 1835US2007151517A1Heater for depositing thin filmIPS LTD·Filed 2006·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →