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IPS LTD
KR14 patents
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US6579372B2Jun 17, 2003
Apparatus and method for depositing thin film on wafer using atomic layer deposition
IPS LTD210 citations99
US6231672B1May 15, 2001
Apparatus for depositing thin films on semiconductor wafer by continuous gas injection
IPS LTD157 citations98
US6573184B2Jun 3, 2003
Apparatus and method for depositing thin film on wafer using atomic layer deposition
IPS LTD60 citations96
US7410676B2Aug 12, 2008
Chemical vapor deposition method
IPS LTD31 citations93
US6852168B2Feb 8, 2005
Reactor for depositing thin film on wafer
IPS LTD29 citations93
US6796316B2Sep 28, 2004
Atomic layer deposition (ALD) thin film deposition equipment having cleaning apparatus and cleaning method
IPS LTD27 citations93
US6183563B1Feb 6, 2001
Apparatus for depositing thin films on semiconductor wafers
IPS LTD246 citations93
US6884297B2Apr 26, 2005
Thin film deposition reactor
IPS LTD19 citations78
US7638437B2Dec 29, 2009
In-situ thin-film deposition method
IPS LTD3 citations62
US7253101B2Aug 7, 2007
Deposition method of TiN thin film having a multi-layer structure
IPS LTD3 citations62
US6740166B2May 25, 2004
Thin film deposition apparatus for semiconductor
IPS LTD6 citations61
US7163719B2Jan 16, 2007
Method of depositing thin film using hafnium compound
IPS LTD2 citations53
US7785664B2Aug 31, 2010
Method of depositing thin film
IPS LTD1 citations51
US7803656B2Sep 28, 2010
Method of depositing chalcogenide film for phase-change memory
IPS LTD1 citations50