Assignee
ISHIDA SEIKI
JP·4 granted patents·52 citations·filing 2006–2012
Top patents by PatentIndex Score
4 records- 0193US8443513B2Substrate processing apparatusISHIDA SEIKI·Filed 2010·Granted May 21, 2013·28 cites·11 claims
- 0290US8154106B2Coating and developing system and coating and developing methodISHIDA SEIKI·Filed 2006·Granted Apr 10, 2012·17 cites·6 claims
- 0375US8303232B2Substrate processing systemISHIDA SEIKI·Filed 2009·Granted Nov 6, 2012·5 cites·9 claims
- 0470US9052610B2Coating and developing system and coating and developing methodISHIDA SEIKI·Filed 2012·Granted Jun 9, 2015·2 cites·8 claims
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