Assignee
ISHINO KOJI
JP·3 granted patents·3 citations·filing 2008–2008
Top patents by PatentIndex Score
3 records- 0164US8550441B2Supporting member and carrier, and method of supportingISHINO KOJI·Filed 2008·Granted Oct 8, 2013·3 cites·9 claims
- 0250US9011654B2Dummy substrate, and start method of, retention/modification method of deposition condition, and stop method of deposition apparatus using sameISHINO KOJI·Filed 2008·Granted Apr 21, 2015·0 cites·6 claims
- 0339US8740205B2Conveyor and deposition apparatus, and maintenance method thereofISHINO KOJI·Filed 2008·Granted Jun 3, 2014·0 cites·5 claims
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