Assignee
ISHIZAWA SHIGERU
JP·1 granted patent·2 pending applications·0 citations·filing 2007–2010
Top patents by PatentIndex Score
3 records- 0142US2007107845A1Semiconductor processing systemISHIZAWA SHIGERU·Filed 2007·Application pending·0 cites
- 0233US8663489B2Substrate replacing method and substrate processing apparatusISHIZAWA SHIGERU·Filed 2010·Granted Mar 4, 2014·0 cites·7 claims
- 0330US2012308341A1Substrate processing apparatus and method of controlling substrate processing apparatusISHIZAWA SHIGERU·Filed 2010·Application pending·0 cites
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