Assignee
ISOBAYASHI ATSUNOBU
US4 patents
Top patents by PatentIndex Score
US8138097B1Mar 20, 2012
Method for processing semiconductor structure and device based on the same
ISOBAYASHI ATSUNOBU18 citations83
US8779590B2Jul 15, 2014
Semiconductor device and method of producing the same
ISOBAYASHI ATSUNOBU11 citations82
US8168528B2May 1, 2012
Restoration method using metal for better CD controllability and Cu filing
ISOBAYASHI ATSUNOBU4 citations61
US8134234B2Mar 13, 2012
Application of Mn for damage restoration after etchback
ISOBAYASHI ATSUNOBU5 citations61