Assignee
ISONO YOSHIMI
JP4 patents
Top patents by PatentIndex Score
US8187787B2May 29, 2012
Fluorine-containing compound, fluorine-containing polymer, negative-type resist composition, and patterning process using same
ISONO YOSHIMI6 citations82
US8513457B2Aug 20, 2013
Fluorine-containing compound, fluorine-containing polymer, negative-type resist composition, and patterning process using same
ISONO YOSHIMI0 citations50
US8592622B2Nov 26, 2013
Polymerizable fluorine-containing compound
ISONO YOSHIMI0 citations49
US8809451B2Aug 19, 2014
Fluorinated dicarboxylic acid derivative and polymer obtained therefrom
ISONO YOSHIMI0 citations39