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ITO KAORU

JP3 patents

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US8110078B2Feb 7, 2012

Substrate supporting device and sputtering apparatus including the same

ITO KAORU4 citations60
US8564929B2Oct 22, 2013

Stacked film capacitor and method of producing the same

ITO KAORU4 citations59
US8228661B2Jul 24, 2012

Film capacitor and method of producing the same

ITO KAORU3 citations59