Assignee
ITOH NORIHIRO
JP·3 granted patents·2 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0162US8444772B2Liquid processing apparatusITOH NORIHIRO·Filed 2009·Granted May 21, 2013·2 cites·8 claims
- 0245US8246759B2Substrate processing apparatus, substrate processing method, and program storage mediumITOH NORIHIRO·Filed 2009·Granted Aug 21, 2012·0 cites·20 claims
- 0337US9064908B2Substrate liquid processing apparatus, liquid processing method, and storage mediumITOH NORIHIRO·Filed 2012·Granted Jun 23, 2015·0 cites·20 claims
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