Assignee
IVANOV VLADIMIR VITALEVICH
RU·1 granted patent·2 pending applications·3 citations·filing 2007–2013
Top patents by PatentIndex Score
3 records- 0161US8493548B2Lithographic apparatus and device manufacturing methodIVANOV VLADIMIR VITALEVICH·Filed 2007·Granted Jul 23, 2013·3 cites·39 claims
- 0244US2013287968A1Lithographic apparatus and device manufacturing methodIVANOV VLADIMIR VITALEVICH·Filed 2013·Application pending·0 cites
- 0331US2013070218A1System for removing contaminant particles, lithographic apparatus, method for removing contaminant particles and method for manufacturing a deviceIVANOV VLADIMIR VITALEVICH·Filed 2011·Application pending·0 cites
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