Assignee
IWAO FUMIKO
JP·2 granted patents·3 citations·filing 2009–2011
Top patents by PatentIndex Score
2 records- 0170US8530357B2Method for manufacturing semiconductor device and apparatus for manufacturing semiconductor deviceIWAO FUMIKO·Filed 2011·Granted Sep 10, 2013·3 cites·4 claims
- 0244US8202682B2Method of manufacturing semiconductor device, and resist coating and developing systemIWAO FUMIKO·Filed 2009·Granted Jun 19, 2012·0 cites·16 claims
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