Assignee
IWASAKI MAYUKA
JP·2 granted patents·4 citations·filing 2009–2012
Top patents by PatentIndex Score
2 records- 0175US8217348B2Electron microscope system and method for evaluating film thickness reduction of resist patternsIWASAKI MAYUKA·Filed 2009·Granted Jul 10, 2012·4 cites·12 claims
- 0251US8502145B2Electron microscope system and method for evaluating film thickness reduction of resist patternsIWASAKI MAYUKA·Filed 2012·Granted Aug 6, 2013·0 cites·20 claims
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