Assignee
IWATO KAORU
JP·8 granted patents·14 citations·filing 2009–2012
Top patents by PatentIndex Score
8 records- 0194US8822129B2Pattern forming method, electron beam-sensitive or extreme ultraviolet-sensitive composition, resist film, manufacturing method of electronic device, and electronic deviceIWATO KAORU·Filed 2012·Granted Sep 2, 2014·12 cites·18 claims
- 0272US9760003B2Pattern forming method and actinic-ray- or radiation-sensitive resin compositionIWATO KAORU·Filed 2011·Granted Sep 12, 2017·2 cites·36 claims
- 0354US8722319B2Pattern forming method, chemical amplification resist composition and resist filmIWATO KAORU·Filed 2011·Granted May 13, 2014·0 cites·15 claims
- 0448US9017917B2Resist composition and method of forming pattern therewithIWATO KAORU·Filed 2009·Granted Apr 28, 2015·0 cites·14 claims
- 0543US8993211B2Actinic ray-sensitive or radiation-sensitive resin composition, and actinic ray-sensitive or radiation-sensitive film and pattern forming method using the sameIWATO KAORU·Filed 2012·Granted Mar 31, 2015·0 cites·19 claims
- 0643US8808965B2Pattern forming method, pattern, chemical amplification resist composition and resist filmIWATO KAORU·Filed 2011·Granted Aug 19, 2014·0 cites·27 claims
- 0742US9140981B2Actinic-ray-sensitive or radiation-sensitive resin composition, and resist film using the same, pattern forming method, electronic device manufacturing method, and electronic device, each using the sameIWATO KAORU·Filed 2012·Granted Sep 22, 2015·0 cites·42 claims
- 0838US10126653B2Pattern forming method and resist compositionIWATO KAORU·Filed 2011·Granted Nov 13, 2018·0 cites·20 claims
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