Assignee
J A WOOLLAM CO INC
US·161 granted patents·2 pending applications·2,684 citations·filing 1994–2023
Top patents by PatentIndex Score
163 records- 0198US7633625B1Spectroscopic ellipsometer and polarimeter systemsJ A WOOLLAM CO INC·Filed 2007·Granted Dec 15, 2009·115 cites·2 claims
- 0297US7907280B2Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslationJ A WOOLLAM CO INC·Filed 2008·Granted Mar 15, 2011·94 cites·28 claims
- 0397US7460230B2Deviation angle self compensating substantially achromatic retarderJ A WOOLLAM CO INC·Filed 2006·Granted Dec 2, 2008·108 cites·21 claims
- 0497US7450231B2Deviation angle self compensating substantially achromatic retarderJ A WOOLLAM CO INC·Filed 2006·Granted Nov 11, 2008·105 cites·18 claims
- 0595US6937341B1System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiationJ A WOOLLAM CO INC·Filed 2002·Granted Aug 30, 2005·96 cites·40 claims
- 0691US10073120B1Integrated vacuum-ultraviolet, mid and near-ultraviolet, visible, near, mid and far infrared and terahertz optical hall effect (OHE) instrument, and method of useJ A WOOLLAM CO INC·Filed 2017·Granted Sep 11, 2018·7 cites·26 claims
- 0791US9851294B1Integrated mid-infrared, far infrared and terahertz optical Hall effect (OHE) instrument, and method of useJ A WOOLLAM CO INC·Filed 2015·Granted Dec 26, 2017·9 cites·39 claims
- 0891US6982792B1Spectrophotometer, ellipsometer, polarimeter and the like systemsJ A WOOLLAM CO INC·Filed 2003·Granted Jan 3, 2006·49 cites·26 claims
- 0991US6456376B1Rotating compensator ellipsometer system with spatial filterJ A WOOLLAM CO INC·Filed 2001·Granted Sep 24, 2002·42 cites·37 claims
- 1091US5521706ASystem and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer systemJ A WOOLLAM CO INC·Filed 1994·Granted May 28, 1996·107 cites·15 claims
- 1190US7492455B1Discrete polarization state spectroscopic ellipsometer system and method of useJ A WOOLLAM CO INC·Filed 2006·Granted Feb 17, 2009·22 cites·6 claims
- 1290US7084978B1Sample orientation system and methodJ A WOOLLAM CO INC·Filed 2005·Granted Aug 1, 2006·15 cites·17 claims
- 1389US10627288B1Systems and methods for producing a more uniform intensity wavelength dispersed beam of electromagnetic radiation entering a multielement detector, while maintaining information content thereinJ A WOOLLAM CO INC·Filed 2019·Granted Apr 21, 2020·3 cites·20 claims
- 1489US10175160B1Method to analyze spectroscopic ellipsometry or intensity data of porous samples utilizing the anisotropic bruggeman-effective medium theoryJ A WOOLLAM CO INC·Filed 2018·Granted Jan 8, 2019·5 cites·14 claims
- 1589US7505134B1Automated ellipsometer and the like systemsJ A WOOLLAM CO INC·Filed 2006·Granted Mar 17, 2009·15 cites·22 claims
- 1689US6353477B1Regression calibrated spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder systemJ A WOOLLAM CO INC·Filed 2000·Granted Mar 5, 2002·39 cites·51 claims
- 1788US10338362B1Beam focusing and reflecting optics with enhanced detector systemJ A WOOLLAM CO INC·Filed 2018·Granted Jul 2, 2019·3 cites·20 claims
- 1888US7746471B1Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systemsJ A WOOLLAM CO INC·Filed 2007·Granted Jun 29, 2010·13 cites·32 claims
- 1987US9976902B1Method to analyze spectroscopic ellipsometry data of porous samples utilizing the anisotropic Bruggeman-effective medium theoryJ A WOOLLAM CO INC·Filed 2017·Granted May 22, 2018·6 cites·24 claims
- 2087US8351036B1System for naturally adjusting the cross-sectional area of a beam of electromagnetic radiation entered to a focusing meansJ A WOOLLAM CO INC·Filed 2010·Granted Jan 8, 2013·8 cites·39 claims
- 2187US7768660B1Non-destructive approach to ellipsometric monitoring of a film coating on the inner surface of a tube shaped sampleJ A WOOLLAM CO INC·Filed 2007·Granted Aug 3, 2010·12 cites·23 claims
- 2287US7468794B1Rotating compensator ellipsometer system with spatial filter equivalentJ A WOOLLAM CO INC·Filed 2005·Granted Dec 23, 2008·12 cites·29 claims
- 2387US6822738B1Spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder systemJ A WOOLLAM CO INC·Filed 2001·Granted Nov 23, 2004·34 cites·44 claims
- 2486US10026167B1Method of obtaining micrographs of transparent or semi-transparent specimens using anisotropic contrastJ A WOOLLAM CO INC·Filed 2015·Granted Jul 17, 2018·6 cites·38 claims
- 2586US8749785B2Operation of an electromagnetic radiation focusing elementJ A WOOLLAM CO INC·Filed 2012·Granted Jun 10, 2014·8 cites·39 claims
- 2686US7426030B1Reduced gas flow purging system in reflectometer, ellipsometer, polarimeter and the like systemsJ A WOOLLAM CO INC·Filed 2007·Granted Sep 16, 2008·14 cites·5 claims
- 2786US7336361B1Spectroscopic ellipsometer and polarimeter systemsJ A WOOLLAM CO INC·Filed 2005·Granted Feb 26, 2008·15 cites·26 claims
- 2886US6859278B1Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systemsJ A WOOLLAM CO INC·Filed 2002·Granted Feb 22, 2005·29 cites·19 claims
- 2986US5666201AMultiple order dispersive optics system and method of useJ A WOOLLAM CO INC·Filed 1995·Granted Sep 9, 1997·95 cites·20 claims
- 3086US5504582ASystem and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer systemJ A WOOLLAM CO INC·Filed 1994·Granted Apr 2, 1996·83 cites·20 claims
- 3185US9500843B1Beam focusing and beam collecting opticsJ A WOOLLAM CO INC·Filed 2016·Granted Nov 22, 2016·4 cites·5 claims
- 3285US7872751B2Fast sample height, AOI and POI alignment in mapping ellipsometer or the likeJ A WOOLLAM CO INC·Filed 2008·Granted Jan 18, 2011·10 cites·29 claims
- 3385US7333198B1Sample orientation system and methodJ A WOOLLAM CO INC·Filed 2006·Granted Feb 19, 2008·10 cites·4 claims
- 3485US7239391B2Method of analysis of multiple layer samplesJ A WOOLLAM CO INC·Filed 2005·Granted Jul 3, 2007·15 cites·28 claims
- 3585US5757494ASystem and method for improving data acquisition capability in spectroscopic ellipsometersJ A WOOLLAM CO INC·Filed 1995·Granted May 26, 1998·77 cites·31 claims
- 3684US7817266B2Small volume cellJ A WOOLLAM CO INC·Filed 2008·Granted Oct 19, 2010·7 cites·11 claims
- 3784US6268917B1Combined polychromatic electromagnetic beam source system with application to ellipsometers, spectrophotometers and polarimetersJ A WOOLLAM CO INC·Filed 2000·Granted Jul 31, 2001·31 cites·18 claims
- 3884US5956145ASystem and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systemsJ A WOOLLAM CO INC·Filed 1998·Granted Sep 21, 1999·85 cites·21 claims
- 3983US9933357B1Elliposometer system with polarization state generator and polarization state analyzer in environmental chamberJ A WOOLLAM CO INC·Filed 2017·Granted Apr 3, 2018·2 cites·10 claims
- 4083US7746472B1Automated ellipsometer and the like systemsJ A WOOLLAM CO INC·Filed 2008·Granted Jun 29, 2010·8 cites·29 claims
- 4183US7345762B1Control of beam spot size in ellipsometer and the like systemsJ A WOOLLAM CO INC·Filed 2005·Granted Mar 18, 2008·8 cites·21 claims
- 4283US7075650B1Discrete polarization state spectroscopic ellipsometer system and method of useJ A WOOLLAM CO INC·Filed 2003·Granted Jul 11, 2006·22 cites·28 claims
- 4383US5963327ATotal internal reflection electromagnetic radiation beam entry to, and exit from, ellipsometer, polarimeter, reflectometer and the like systemsJ A WOOLLAM CO INC·Filed 1998·Granted Oct 5, 1999·69 cites·19 claims
- 4482US12405210B1System for, and calibration and testing of directed beam ellipsometer systemsJ A WOOLLAM CO INC·Filed 2023·Granted Sep 2, 2025·0 cites·4 claims
- 4582US7821637B1System for controlling intensity of a beam of electromagnetic radiation and method for investigating materials with low specular reflectance and/or are depolarizingJ A WOOLLAM CO INC·Filed 2008·Granted Oct 26, 2010·8 cites·3 claims
- 4682US7304737B1Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidenceJ A WOOLLAM CO INC·Filed 2006·Granted Dec 4, 2007·8 cites·17 claims
- 4782US7304792B1System for sequentially providing aberation corrected electromagnetic radiation to a spot on a sample at multiple angles of incidenceJ A WOOLLAM CO INC·Filed 2006·Granted Dec 4, 2007·11 cites·9 claims
- 4882US7158231B1Spectroscopic ellipsometer and polarimeter systemsJ A WOOLLAM CO INC·Filed 2003·Granted Jan 2, 2007·26 cites·28 claims
- 4982US6804004B1Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetryJ A WOOLLAM CO INC·Filed 2000·Granted Oct 12, 2004·21 cites·30 claims
- 5082US6795184B1Odd bounce image rotation system in ellipsometer systemsJ A WOOLLAM CO INC·Filed 2001·Granted Sep 21, 2004·24 cites·10 claims
Showing the top 50 of 163 patent records by PatentIndex Score.
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