Assignee
JACOBS JOHANNES HENRICUS WILHELMUS
NL·4 granted patents·37 citations·filing 2009–2010
Top patents by PatentIndex Score
4 records- 0192US8564763B2Lithographic apparatus and methodJACOBS JOHANNES HENRICUS WILHELMUS·Filed 2009·Granted Oct 22, 2013·32 cites·20 claims
- 0287US9268236B2Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holderJACOBS JOHANNES HENRICUS WILHELMUS·Filed 2010·Granted Feb 23, 2016·5 cites·27 claims
- 0344US8462313B2Lithographic apparatus and device manufacturing methodJACOBS JOHANNES HENRICUS WILHELMUS·Filed 2010·Granted Jun 11, 2013·0 cites·23 claims
- 0443US8705009B2Heat pipe, lithographic apparatus and device manufacturing methodJACOBS JOHANNES HENRICUS WILHELMUS·Filed 2010·Granted Apr 22, 2014·0 cites·20 claims
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