Assignee
JAIN KANTILAL
US4 patents
Top patents by PatentIndex Score
US5059013AOct 22, 1991
Illumination system to produce self-luminous light beam of selected cross-section, uniform intensity and selected numerical aperture
JAIN KANTILAL159 citations97
US4924257AMay 8, 1990
Scan and repeat high resolution projection lithography system
JAIN KANTILAL266 citations97
US4881231ANov 14, 1989
Frequency-stabilized line-narrowed excimer laser source system for high resolution lithography
JAIN KANTILAL70 citations95
US4991962AFeb 12, 1991
High precision alignment system for microlithography
JAIN KANTILAL32 citations91