Assignee
JANSEN HANS
NL7 patents
Top patents by PatentIndex Score
US8233135B2Jul 31, 2012
Lithographic apparatus and device manufacturing method
JANSEN HANS55 citations97
US8941811B2Jan 27, 2015
Lithographic apparatus and device manufacturing method
JANSEN HANS4 citations83
US8638419B2Jan 28, 2014
Lithographic apparatus and device manufacturing method
JANSEN HANS4 citations83
US8115899B2Feb 14, 2012
Lithographic apparatus and device manufacturing method
JANSEN HANS4 citations73
US8859188B2Oct 14, 2014
Immersion liquid, exposure apparatus, and exposure process
JANSEN HANS2 citations62
US8138486B2Mar 20, 2012
Lithographic apparatus and device manufacturing method
JANSEN HANS2 citations62
US8481978B2Jul 9, 2013
Lithographic apparatus and device manufacturing method
JANSEN HANS0 citations51