Assignee
JANSEN MAARTEN JOZEF
NL·3 granted patents·10 citations·filing 2010–2012
Top patents by PatentIndex Score
3 records- 0180US8937707B2Lithographic apparatus, device manufacturing method, and method of calibrating a displacement measuring systemJANSEN MAARTEN JOZEF·Filed 2012·Granted Jan 20, 2015·4 cites·20 claims
- 0272US8547557B2Apparatus for determining a height map of a surface through both interferometric and non-interferometric measurementsJANSEN MAARTEN JOZEF·Filed 2010·Granted Oct 1, 2013·4 cites·15 claims
- 0360US8576410B2Method and apparatus for determining a height of a number of spatial positions on a sampleJANSEN MAARTEN JOZEF·Filed 2010·Granted Nov 5, 2013·2 cites·19 claims
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